Skip to main content
SpringerLink
Log in

The interdependence between the incidence angles associated with quasi-stable intersections during ion erosion

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

A general discussion, which is valid for any angular dependence of sputtering yieldS=S(θ), concerning the interdependence between the incidence anglesθ e andθ 0, associated with quasi-stable intersections during ion erosion, is given. The object was firstly to establish the location ofθ e roots as a function ofθ 0 and secondly to identify the stationary points and general trend for the complex dependenceθ e=θ e(θ 0). The results obtained are applied to a quasi-stability analysis of some specific surface features during ion erosion. Various possible types of quasi-stable intersections (surface-surface, plane-surface, plane-plane) are reviewed from the point of view of their evolution caused by ion bombardment.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. P. Ducommun, M. Cantagrel andM. Moulin,J. Mater. Sci. 10 (1975) 52.

    Google Scholar 

  2. G. Carter, J. S. Colligon andM. J. Nobes,Rad. Effects 31 (1977) 65.

    Google Scholar 

  3. J. P. Ducommun, M. Cantagrel andM. Marchal,J. Mater. Sci. 9 (1974) 725.

    Google Scholar 

  4. R. Smith andJ. M. Walls,Phil. Mag. A 42 (1980) 235.

    Google Scholar 

  5. R. Smith, T. P. Valkering andJ. M. Walls,ibid. A44 (1981) 879.

    Google Scholar 

  6. F. Vasiliu andS. Frunza,J. Mater. Sci. 18 (1983) 3562.

    Google Scholar 

  7. C. Catana, J. S. Colligon andG. Carter,ibid. 7 (1972) 467.

    Google Scholar 

  8. T. Ishitani, M. Kato andR. Shimizu,ibid. 9 (1974) 505.

    Google Scholar 

  9. G. Carter, M. J. Nobes, K. I. Arshak, R. P. Webb, D. Evanson, B. D. L. Eghawary andJ. H. Williamson,ibid. 14 (1979) 728.

    Google Scholar 

  10. F. Vasiliu andS. Frunza,J. Mater. Sci. Lett. 2 (1983) 249.

    Google Scholar 

  11. G. W. Lewis, G. Carter, M. J. Nobes andS. A. Gruz,Rad. Effects Lett. 58 (1981) 119.

    Google Scholar 

  12. D. J. Barber, F. C. Frank, M. Moss, J. W. Steeds andI. S. T. Tsong,J. Mater. Sci. 8 (1973) 1030.

    Google Scholar 

  13. M. J. Nobes, J. S. Colligon andG. Carter,ibid. 4 (1969) 730.

    Google Scholar 

  14. G. Carter, J. S. Colligon andM. J. Nobes,ibid. 8 (1973) 1473.

    Google Scholar 

  15. G. W. Lewis, M. J. Nobes, G. Carter andJ. L. Whitton,Nucl. Instrum. Meth. 170 (1980) 363.

    Google Scholar 

  16. G. Carter, M. J. Nobes andJ. L. Whitton,J. Mater. Sci. 13 (1978) 2725.

    Google Scholar 

  17. H. Dimigen, H. Luthje, H. Hubsch andU. Convertini,J. Vac. Sci. Technol. 13 (1976) 976.

    Google Scholar 

  18. G. K. Wehner,J. Appl. Phys. 30 (1959) 1762.

    Google Scholar 

  19. B. B. Meckel, T. Nenadovic, B. Perovic andA. Vlahov,J. Mater. Sci. 10 (1975) 1188.

    Google Scholar 

  20. M. J. Witcomb,ibid. 9 (1974) 551.

    Google Scholar 

  21. Idem, ibid. 11(1976) 859.

    Google Scholar 

  22. F. Vasiliu,Rev. Roum. Phys. 5 (1977) 523.

    Google Scholar 

  23. F. Vasiliu andS. Frunza,ibid. 6 (1977) 601.

    Google Scholar 

  24. F. Vasiliu,Rad. Effects 45 (1980) 213.

    Google Scholar 

  25. R. Kelly andO. Auciello,Surface Sci. 100 (1980) 135.

    Google Scholar 

  26. I. A. Teodorescu andF. Vasiliu,Rad. Effects 15 (1972) 101.

    Google Scholar 

  27. O. Auciello, R. Kelly andR. Irichibar,ibid. 46 (1980) 105.

    Google Scholar 

  28. O. Auciello andR. Kelly,ibid. 66 (1982) 195.

    Google Scholar 

  29. J. L. Whitton, G. Carter, M. J. Nobes andJ. S. Williams,ibid. 32 (1977) 129.

    Google Scholar 

  30. G. Carter, M. J. Nobes, J. L. Whitton, J. S. Williams andL. Tanovic, Proceedings 7th International Conference on Atomic Collisions in Solids, Moscow, 1977, Vol. 2 (Moscow State University Publ. House, 1980) p. 69.

  31. J. L. Whitton, L. Tanovic andJ. S. Williams,Appl. Surf. Sci. 1 (1978) 408.

    Google Scholar 

  32. J. L. Whitton, O. Holck, G. Carter andM. J. Nobes,Nucl. Instrum. Meth. 170 (1980) 371.

    Google Scholar 

  33. L. T. Chadderton,Rad. Effects 33 (1977) 129.

    Google Scholar 

  34. O. Auciello andR. Kelly,Rad. Effects Lett. 43 (1979) 187.

    Google Scholar 

  35. P. Hayamann,Rev. Metall. 58 (1961) 73.

    Google Scholar 

  36. P. Haymann andC. Waldburger, “Ionic Bombardment Theory and Applications” (Gordon and Breach, New York, 1964) p. 294.

    Google Scholar 

  37. W. Hauffe,Phys. Status Solidi (a) 4 (1971) 111.

    Google Scholar 

  38. P. G. Gloersen,J. Vac. Sci. Technol. 12 (1975) 28.

    Google Scholar 

  39. M. Cantagrel,Microelectron. Reliab. 14 (1975) 419.

    Google Scholar 

Download references

Author information

Author notes

  1. F. Vasiliu

    Present address: Institute for Physics and Technology of Materials, P.O. Box MG-07, R-76900, Bucharest-Magurele, Romania

Authors and Affiliations

  1. National Institute for Scientific and Technical Creation, Bulev. Păcci, PO Box 16, Code 79622, Bucharest, Romania

    F. Vasiliu

  2. Institute for Physics and Technology of Materials, PO Box MG-07, R-76900, Bucharest-Magurele, Romania

    S. Frunza

Authors
  1. F. Vasiliu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. Frunza
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Vasiliu, F., Frunza, S. The interdependence between the incidence angles associated with quasi-stable intersections during ion erosion. J Mater Sci 19, 2153–2164 (1984). https://doi.org/10.1007/BF01058091

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01058091

Keywords

Search

Navigation