Abstract
SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. SrTiO3 thin films were found to have paraelectric properties with C-V characteristics.
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Pontes, F.M., Lee, E.J.H., Leite, E.R. et al. High dielectric constant of SrTiO3 thin films prepared by chemical process. Journal of Materials Science 35, 4783–4787 (2000). https://doi.org/10.1023/A:1004816611050
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DOI: https://doi.org/10.1023/A:1004816611050