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Revealing of lattice defects on {001} GaAs surfaces by KI:I:H2SO4-etchant

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Journal of Materials Science Letters

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References

  1. J. G. GRABMAIER and C. B. WATSON,Phys. Status Solidi 32 (1969) K13.

    Google Scholar 

  2. M. S. ABRAHAMS and C. J. BUIOCCHI,J. Appl. Phys. 36 (1965) 2855.

    Google Scholar 

  3. F. KUHN-KUHNENFELD,J. Electrochem. Soc. 119 (1972) 1063.

    Google Scholar 

  4. V. GOTTSCHALCH,Kristall Tech. 14 (1979) 939.

    Google Scholar 

  5. A. MUNOZ-YAGUE and M. BAFLEUR,J. Cryst. Growth 53 (1981) 239.

    Google Scholar 

  6. J. L. WEYER and J. VAN DE VENJ. Cryst. Growth 78 (1986) 191.

    Google Scholar 

  7. G. A. ROZGONY and T. IIZUKA,J. Electrochem. Soc. 120 (1973) 673.

    Google Scholar 

  8. S. KOMIYA and T. KOTANI,J. Electrochem. Soc. 125 (1978) 2019.

    Google Scholar 

  9. M. ISHII, R. HIRANO, M. YAMAMOTA, K. URATA and T. INOGUCHI,Jpn J. Appl. Phys. 17 (1978) 447.

    Google Scholar 

  10. T. TAKENAKA, H. HAYASHI, K. MURATA and T. INOGUCHI,Jpn J. Appl. Phys. 17 (1978) 1145.

    Google Scholar 

  11. C. WERKHOVEN, C. VAN OPDORP and A. T. VINK,Philips Tech. Rev. 38 (1978–1979) 41.

    Google Scholar 

  12. V. GOTTSCHALCH, G. WAGNER and M. PASEMANN,Cryst. Res. Technol. 16 (1981) 1001.

    Google Scholar 

  13. D. J. STIRLAND, P. D. AUGUSTUS and B. W. STRAUGHAN,J. Mater. Sci. 13 (1978) 657.

    Google Scholar 

  14. J. ANGILELLO, R. M. POTEMSKI and G. R. WOOL-HOUSE,J. Appl. Phys. 46 (1975) 2315.

    Google Scholar 

  15. K. ISHIDA and H. KAWANO,Phys. Status Solidi (a)98 (1986) 175.

    Google Scholar 

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Gottschalch, V., Herrnberger, H. Revealing of lattice defects on {001} GaAs surfaces by KI:I:H2SO4-etchant. J Mater Sci Lett 9, 7–10 (1990). https://doi.org/10.1007/BF00722852

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  • DOI: https://doi.org/10.1007/BF00722852

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