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Riedel, R., Petzow, G. & Klingebiel, U. Characterization of AlN powder produced by the reaction of AlCl3 with hexamethyldisilazane. J Mater Sci Lett 9, 222–224 (1990). https://doi.org/10.1007/BF00727723
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DOI: https://doi.org/10.1007/BF00727723