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Thin film characterisation using backscattering spectrometry

  • Other Nuclear and Related Techniques
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Abstract

The use of proton resonance backscattering spectrometry for the estimation of carbon as thin films formed on a target material is discussed. Conventional He backscattering experiments were also carried out on TiVN films formed on beryllium backing but the determination of stoichiometry of these films were difficult using conventional software for depth resolution.

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Authors and Affiliations

  1. National Centre for Compositional Characterisation of Materials, E.C.I.L. Post, 500062, Hyderabad, India

    J. V. Ramana, V. S. Raju & S. Gangadharan

Authors
  1. J. V. Ramana
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  2. V. S. Raju
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  3. S. Gangadharan
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Ramana, J.V., Raju, V.S. & Gangadharan, S. Thin film characterisation using backscattering spectrometry. J Radioanal Nucl Chem 217, 293–295 (1997). https://doi.org/10.1007/BF02034459

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  • DOI: https://doi.org/10.1007/BF02034459

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