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Instrumental Neutron Activation Analysis for Certification of Ion-Implanted Arsenic in Silicon

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Abstract

Standard reference material (SRM) 2134 Arsenic Implant in Silicon was produced at the National Institute of Standards and Technology (NIST) as a calibrant for secondary ion mass spectrometry. Instrumental neutron activation analysis was used as a primary method for certification of the arsenic implanted dose. A complete evaluation of all sources of uncertainty yielded an expanded relative uncertainty for the mean value of this SRM to be 0.38% at approximately the 95% level of confidence. No evidence indicating significant heterogeneity among samples was observed.

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Authors and Affiliations

  1. Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland, USA

    R. R. Greenberg, R. M. Lindstrom & D. S. Simons

Authors
  1. R. R. Greenberg
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  2. R. M. Lindstrom
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  3. D. S. Simons
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Greenberg, R.R., Lindstrom, R.M. & Simons, D.S. Instrumental Neutron Activation Analysis for Certification of Ion-Implanted Arsenic in Silicon. Journal of Radioanalytical and Nuclear Chemistry 245, 57–63 (2000). https://doi.org/10.1023/A:1006703131599

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  • DOI: https://doi.org/10.1023/A:1006703131599

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