Abstract
The deposition of the condensed phase YBa2Cu3O7−x from a gas mixture composed of YCl3, BaCl2, Cu3Cl3, and Ar reacting with another consisting of O2 and Ar in a flow system at elevated temperatures was investigated by means of the virtual equilibrium model, and the deposition rates were computed as a function of input gas stream compositions. The optimum growth conditions were identified.
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Rao, Y.K., Kim, S.S. Chemical vapor deposition of the superconductor YBa2Cu3O7−x (s) from the gas phase. J Supercond 2, 395–407 (1989). https://doi.org/10.1007/BF00618526
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DOI: https://doi.org/10.1007/BF00618526