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Photoluminescence of anodized silicon carbide

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Abstract

The luminescence of single-crystalline 6H-SiC plates after electrochemical etching has been investigated. The photoluminescence spectrum was found to change strongly after etching; the decay times of separate bands were determined. Just as in the case of silicon, the change in the photoluminescence could be due to the formation of nanostructures.

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Fiz. Tekh. Poluprovodn. 31, 315–317 (February 1997)

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Agekyan, V.F., Stepanov, Y.A., Lebedev, A.A. et al. Photoluminescence of anodized silicon carbide. Semiconductors 31, 202–203 (1997). https://doi.org/10.1134/1.1187109

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  • DOI: https://doi.org/10.1134/1.1187109

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