Skip to main content
SpringerLink
Log in

Spark source mass spectrometry in the research laboratories of an electronic industry

Hochfrequenzfunken-Massenspektrometrie im Forschungslaboratorium eines Unternehmens der Elektronik-Industrie

  • Published:
Fresenius' Zeitschrift für analytische Chemie Aims and scope Submit manuscript

Zusammenfassung

Die Hochfrequenzfunken-Massenspektrometrie eignet sich zur qualitativen und quantitativen Analyse von anorganischen Materialien. 83 Elemente können mit Nachweisgrenzen bis in den ppb-Bereich bestimmt werden. In den Philips-Forschungslaboratorien wurde mit dieser Technik eine große Vielfalt von Bulk- und Dünnschicht-Materialien mit gutem Erfolg analysiert. Einige neue Entwicklungen der Festkörper-Massenspektrometrie werden besprochen.

Summary

Spark-source mass spectrometry is suitable for qualitative and quantitative analysis of inorganic materials. 83 elements can be determined with detection limits down to the ppb-range. With this method a wide range of bulk and thin-layer materials has been succesfully analysed in the Philips Research Laboratories. Some new developments of solid state mass spectrometry are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Ahearn, A. J.: Trace analysis by mass spectrometry. New York: Acad. Press 1972

    Google Scholar 

  2. Conzemius, R. J., Capellen, J. M.: Int. J. Mass. Spectrom. Ion Phys. 34, 197 (1980)

    Google Scholar 

  3. Jansen, J. A. J., Witmer, A. W.: Fresenius Z. Anal. Chem. this issue

  4. Jansen, J. A. J., Witmer, A. W.: Spectrochim. Acta B (in press)

  5. Kienitz, H.: Massenspektrometrie. Weinheim: Verlag Chemie 1968

    Google Scholar 

  6. Roth, A.: Vacuum Technology. Amsterdam: North Holland 1976

    Google Scholar 

  7. Severijns, A. P., Meeuwsen, T. P.: Laboratory internal communication

  8. Visser, J., Symersky, B., Geraerts, A. J.: Vacuum 27, 175 (1977)

    Google Scholar 

  9. Witmer, A. W.: Techn. Rundschau 9, 3 (1973)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Philips Res. Lab., NL-5600, MD Eindhoven, The Netherlands

    J. A. J. Jansen & A. W. Witmer

Authors
  1. J. A. J. Jansen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. W. Witmer
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Jansen, J.A.J., Witmer, A.W. Spark source mass spectrometry in the research laboratories of an electronic industry. Fresenius Z. Anal. Chem. 309, 262–265 (1981). https://doi.org/10.1007/BF00488597

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00488597

Key words

Search

Navigation