Electron microscopic characterization of SrTiO3 films obtained by anodic spark deposition

Abstract

Crystalline strontium titanate layers were deposited on titanium anodes from Sr(OH)₂ aqueous electrolyte solutions by a plasmachemical-electrochemical process of anodic spark deposition. X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) have been used to study the properties of the polycrystalline material. Strontium titanate was deposited on the titanium anode surface as a ceramic layer from an aqueous electrolyte. The typical pore structure morphology of the anodic spark deposit (ASD) was characterized by SEM as well as fractures which provide an intimate contact between layer and substrate. XRD-study showed that the layers are composed of a mixture of SrTiO₃ and TiO₂.