Abstract
The application of a retarding-dispersive energy analyzer as the pre-filter of a quadrupole mass analyzer has made it possible to combine a standard high-speed Secondary Ion Mass Spectrometer (SIMS) and a high-resolution secondary-ion energy analyzer into one instrument. Data taken with this instrument indicate the presence of very significant high-energy tails in the energy distribution of all observed secondary ions, even with relatively low (2 keV) primary ion energies. The shape of the energy distribution varies widely from element to element, for atomic compared to molecular species sputtered from a clean metal surface, and depends, for a given species sputtered from a metal surface, on the degree of surface oxidation.
The variations established in the present work are large enough to introduce in many cases substantial discrepancies between published values of both relative ion sputtering yields and surface elemental concentrations and values obtained by considering the complete energy distribution. Methods of obtaining accurate secondary ion yields by integrating the energy distribution are discussed.
Similar content being viewed by others
Refernces
A.R.Krauss, D.M.Gruen: J. Nucl. Mat.63 (in press)
P.Sigmund: Phys. Rev.184, 383 (1969)
M.W.Thompson: Phil. Mag.18, 377 (1968)
G.P.Können, A.Tip, A.E.de Vries: Rad. Eff.21, 269 (1974)
M.W.Thompson: Phil. Mag.18, 415 (1968)
G.P.Können, J.Grosser, A.Haring, A.E.DeVries, J.Kistemaker: Rad. Eff.21, 171 (1974)
C.A.Andersen: Int. J. Mass Spec. Ion Phys.2, 61 (1969),3, 413 (1970)
W.F.Van derWeg, D.J.Bierman: Physica44, 177, 206 (1969)
A.Benninghoven. Z. Physik220, 159 (1969)
J.M.Schroeer, T.N.Rhodin, R.CBradley: Surf. Sci.34, 571 (1973)
Z.Sroubek: Surf. Sci.44, 47 (1974)
P.Joyes: J. Phys. (Paris)30, 365 (1969)
G.Blaise, G.Slodzian: J. Phys. (Paris)31, 93 (1970)
R.J.MacDonald: Surf. Sci.43, 653 (1974)
E.Dennis, R.J.MacDonald: Rad. Eff.13, 243 (1972)
Z.Jurela: Rad. Eff.19, 175 (1973)
R.J.MacDonald: Adv. Phys.19, 457 (1970)
G.Staudenmaier: Rad. Eff.13, 87 (1972)
Z.Jurela, B.Perovic: Can. J. Phys.46, 773 (1968)
P.Staib: Vacuum22, 481 (1972)
J.Kirschner, P.Staib: 34th Ann Conf. Physical Electronics, Murray Hill, NJ (1974)
W.Paul, H.P.Reinhard, U.vonZahn: Z. Physik152, 143 (1958)
Extranuclear Laboratories Model No. 270-9 with 2.2 MHz RF head
R.Nagarajon, P.K.Ghosh: Int. J. Mass. Spec. Ion Phys.12, 79 (1973)
P.H.Dawson: Int. J. Mass. Spec. Ion Phys.17, 423, 447 (1975)
Extranuclear Laboratories model 13 high-voltage RF head
D.A.Huchital, J.D.Rigden: J. Appl. Phys.43, 2291 (1972)
C.A.Andersen, J.R.Hinthorne: Anal. Chem.45, 1421 (1973)
G.Sparrow: Private communication
F.G.Rudenauer: Vacuum22, 609 (1972)
UTI model 100C
A.Benninghoven, C.Plog, N.Treitz: Int. J. Mass. Spec. Ion Phys.13, 415 (1974)
G.P.Können, A.Tip, A.E.deVries: Rad. Eff.26, 23 (1975)
F.Bernhardt, H.Oechsner, E.Stumpe: Nucl. Inst. Meth.132, 329 (1976)
G.A.v. d.Schootbrugge, A.G.J.deWit, J.M.Fluit: Nucl. Inst. Meth.132, 321 (1976)
K.Wittmaack: Nucl Inst. Meth.132, 381 (1976)
Author information
Authors and Affiliations
Additional information
Work performed under the auspices of the Division of Physical Research of the U.S. Energy Research and Development Administration.
Rights and permissions
About this article
Cite this article
Krauss, A.R., Gruen, D.M. Relative ion sputtering yield measurements by integration of secondary ion energy distribution using a retarding-dispersive Ion energy analyzer. Appl. Phys. 14, 89–97 (1977). https://doi.org/10.1007/BF00882637
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00882637