Abstract
The influence of the preioniser and main discharge circuit parameters on the performance of a high pressure UV preionised KrF laser using NF3 as the fluorine donor has been investigated. Output laser energy densities of 1.7J·1−1 based on the mode volume have been obtained under optimised conditions.
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Calculated taking the decrease in bank capacitance with increasing charging voltage into account (Sprague Engineering Bulletin 6311B)
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Bourne, O.L., Dyer, P.E. & Tait, B.L. Influence of circuit and UV prioniser parameters on the performance of a discharge pumped KrF laser. Appl. Phys. 18, 357–361 (1979). https://doi.org/10.1007/BF00899689
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DOI: https://doi.org/10.1007/BF00899689