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Silicone polymer deposition by CO2 laser induced decomposition of silane in the presence of methyl methacrylate

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Abstract

Infrared multiphoton decomposition of monosilane in the presence of methyl methacrylate results in the formation of gaseous methane, acetylene, butenes and carbon monoxide along with a solid polymer whose chemical mechanism of formation is discussed in line of the poly(dimethylsiloxane) structure inferred from ESCA and IR spectral analysis.

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Authors and Affiliations

  1. Laser Department of Institute of Physics and Technology of Radiation Devices, Central Institute of Physics, Bucharest-Magurele, Romania

    R. Alexandrescu, J. Morjan, C. Grigoriu & I. N. Mihailescu

  2. The Heyrovsky Institute of Physical Chemistry and Electrochemistry, CS-11840, Prague 1, Czechoslovakia

    Z. Bastl

  3. Institute of Inorganic Chemistry, CS-25068, Rez near Prague, Czechoslovakia

    J. Tlaskal & R. Mayer

  4. Institute of Chemical Process Fundamentals, CS-16502, Prague 6 Suchdol, Czechoslovakia

    J. Pola

Authors
  1. R. Alexandrescu
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  2. J. Morjan
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  3. C. Grigoriu
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  4. I. N. Mihailescu
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  5. Z. Bastl
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  6. J. Tlaskal
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  7. R. Mayer
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  8. J. Pola
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Alexandrescu, R., Morjan, J., Grigoriu, C. et al. Silicone polymer deposition by CO2 laser induced decomposition of silane in the presence of methyl methacrylate. Appl. Phys. A 46, 275–279 (1988). https://doi.org/10.1007/BF01210346

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  • DOI: https://doi.org/10.1007/BF01210346

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