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Energies of carbon plasma beams in the deposition of diamond-like coatings with the pulsed-arc-discharge method

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Abstract

The carbon plasma ion energies produced by the pulsed filtered arc-discharge method have been measured as a function of the anode-cathode voltage. The energies were determined by using the electro-optical time-of-flight method. The highest anode-cathode voltage was 5 kV and yielded the energy of 140 eV for the plasma ions. In addition, it was demonstrated that a rather slight change of the parameters in the arc-discharge method has a strong effect on the plasma ion energies and the properties of the diamond-like coatings prepared.

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Authors and Affiliations

  1. Department of Physics, University of Helsinki, P.O. Box 9, FIN-00014, Helsinki, Finland

    J. Salo, R. Lappalainen & A. Anttila

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  1. J. Salo
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  2. R. Lappalainen
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  3. A. Anttila
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Salo, J., Lappalainen, R. & Anttila, A. Energies of carbon plasma beams in the deposition of diamond-like coatings with the pulsed-arc-discharge method. Appl. Phys. A 61, 353–355 (1995). https://doi.org/10.1007/BF01540107

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  • DOI: https://doi.org/10.1007/BF01540107

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