Photo-decomposition of thin palladium acetate films with 126 nm radiation

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O₃, AlN and Si substrates produced by vacuum ultraviolet induced decomposition of palladium acetate is described. The palladium films formed and the palladium acetate layers used were characterised by using ultraviolet spectrophotometry and Fourier transform infrared (FTIR) spectroscopy. The optical transmission of the films after irradiation with pseudo-continuous 126 nm radiation generated by an excimer lamp provided information about the decomposition rate at different pressures and exposure times. The FTIR spectra recorded the chemical changes of the C=O, COO^- and CH₃ groups at different exposure times. The decomposition mechanism of the palladium acetate under these conditions appears to be quite different to that induced by pulsed laser irradiation.