Abstract.
The crystalline properties of Ta2O5 thin films deposited by an off-axis aperture-installation-type pulsed laser deposition technique are investigated and the results are compared with the results for films deposited by the conventional on-axis technique. No significant difference in the substrate temperature dependence is seen between films deposited on-axis or off-axis at a pulse repetition frequency of 30 Hz. When the repetition frequency is lowered, the degree of c-axis orientation is increased in both films. This tendency is more pronounced in the off-axis films. Therefore it is found that the off-axis aperture-installation-type pulsed laser deposition technique is effective not only for decreasing the density of droplets, but also for obtaining more highly c-axis-oriented crystalline films.
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Received: 21 July 1999 / Accepted: 1 September 1999 / Published online: 22 December 1999
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Inoue, N., Ninomiya, T., Kashiwabara, S. et al. Ta2O5 thin-films deposited by off-axis and on-axis pulsed laser deposition techniques . Appl Phys A 69 (Suppl 1), S609–S612 (1999). https://doi.org/10.1007/s003390051487
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DOI: https://doi.org/10.1007/s003390051487