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Pulsed laser deposition of carbon nitride films by a sub-ps laser

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Abstract.

CNx (0.01<x<0.06) films were grown from a graphite target by pulsed laser deposition in a low-pressure nitrogen environment at room temperature, using a sub-psultraviolet laser. With increasing nitrogen pressure from 3×10-2 to 0.6 mbar the nitrogen content of the films increases monotonously, as determined by X-ray photoelectron spectroscopy. Raman spectroscopy reveals that the films consist predominantly of highly amorphous carbon.

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Authors and Affiliations

  1. Department of Optics and Quantum Electronics, JATE University, P.O. Box 406, 6701 Szeged, Hungary, , , , , , HU

    Z. Geretovszky

  2. Research Group on Laser Physics of the Hungarian Academy of Sciences, P.O. Box 406, 6701 Szeged, Hungary, , , , , , HU

    Z. Kántor & T. Szörényi

  3. Research Laboratory of Materials and Environmental Chemistry, Chemical Research Center of the Hungarian Academy of Sciences, P.O. Box 17, 1525 Budapest, Hungary, , , , , , HU

    I. Bertóti

Authors
  1. Z. Geretovszky
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  2. Z. Kántor
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  3. I. Bertóti
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  4. T. Szörényi
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Additional information

Received: 10 September 1999 / Accepted: 11 September 1999 / Published online: 3 December 1999

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Geretovszky, Z., Kántor, Z., Bertóti, I. et al. Pulsed laser deposition of carbon nitride films by a sub-ps laser . Appl Phys A 70, 9–11 (2000). https://doi.org/10.1007/s003390050003

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  • DOI: https://doi.org/10.1007/s003390050003

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