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Long lifetime operation of an ArF-excimer laser

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Abstract

An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.

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Authors and Affiliations

  1. Opto-Electronics Research Laboratories, NEC Corporation, 1-1, Miyazaki, 4-chome, Miyamae-ku, 216, Kawasaki, Kanagawa, Japan

    T. Saito, S. Ito & A. Tada

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  1. T. Saito
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  2. S. Ito
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  3. A. Tada
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Saito, T., Ito, S. & Tada, A. Long lifetime operation of an ArF-excimer laser. Appl. Phys. B 63, 229–235 (1996). https://doi.org/10.1007/BF01833791

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  • DOI: https://doi.org/10.1007/BF01833791

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