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Micromachining program status at the SRRC

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Abstract

 This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.

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Authors and Affiliations

  1. Synchrotron Radiation Research Center, No. 1 R&D Road VI, SBI Park, 30077 Hsinchu, Taiwan, R.O.C., , , , , , TW

    Y. Cheng, B.-Y. Shew & W.-K. Yang

  2. National Tsing Hua University, Hsinchu, Taiwan, R.O.C., , , , , , TW

    W.-P. Shih, S. S. Wang & C. Y. Lin

  3. National Chiao Tung University, Hsinchu, Taiwan, R.O.C., , , , , , TW

    M. Lu

  4. National Taiwan University, Taipei, Taiwan, R.O.C., , , , , , TW

    W. H. Lee

Authors
  1. Y. Cheng
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  2. B.-Y. Shew
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  3. W.-P. Shih
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  4. S. S. Wang
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  5. C. Y. Lin
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  6. W.-K. Yang
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  7. M. Lu
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  8. W. H. Lee
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Received: 25 August 1997/Accepted: 3 September 1997

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Cheng, Y., Shew, BY., Shih, WP. et al. Micromachining program status at the SRRC. Microsystem Technologies 4, 12–16 (1997). https://doi.org/10.1007/s005420050083

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  • DOI: https://doi.org/10.1007/s005420050083

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