Abstract
The study deals with the manufacture of diffraction grating by applying the ultraprecision microgrooving technology. Microgrooving is performed by the use of a lathe-type ultraprecision milling machine having 1 nm positioning accuracy, together with a rotating diamond cutter. As an example of microgroove, a diffraction grating with 32 768 V-shaped grooves is fabricated in a pitch of 1 μm and a depth of 0.5 μm around the circumference of copper disk of 12 mm in diameter. The high-speed rotating cutter allows the microgrooves to be sharply machined without burrs and accumulative pitch errors, taking account of cutting order. The surface roughness of machined grooves is 1 nm (Ra), which experimentally shows good optical properties.
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Received: 21 December 1998 / Accepted: 18 January 1999
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Sawada, K., Odaka, S., Kawai, T. et al. Manufacture of diffraction grating on tiny parts by means of ultraprecision milling. Microsystem Technologies 5, 157–160 (1999). https://doi.org/10.1007/s005420050156
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DOI: https://doi.org/10.1007/s005420050156