Micromachined gas sensors for environmental pollutants

Abstract

An Au doped tin oxide thin film was deposited as base material for carbon monoxide detection over a micromachined substrate. The performances of a recent technique to heat the device, named fast pulsed temperature supply, are presented. This technique exploits the property that, due to the very low thermal mass of the membrane, the term required to reach steady state conditions is very short (about 40 ms). The sensor heater is periodically supplied for very short terms, hundred of milliseconds, and kept off for long ones, seconds or more. Besides a strong reduction of power consumption compared with isothermal characterization, an increase of sensitivity is observed. Different shapes of the heating wave were examined and results are summarized and compared.