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Development of new position sensitive electron multiplication device fabricated by LIGA process

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Authors and Affiliations

  1. Department of Quantum Engineering and Systems Science, University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, Japan, , , , , , JP

    M. Inoue, D. Fukuda, H. Takahashi & M. Nakazawa

  2. Department of Nuclear Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan, , , , , , JP

    J. Kawarabayashi

  3. Sumitomo Electric Industries Ltd., Harima Science Garden City 1431-12, Kamigori, Hyogo 678-1201, Japan, , , , , , JP

    Y. Hirata, T. Numazawa & T. Haga

Authors
  1. M. Inoue
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  2. D. Fukuda
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  3. H. Takahashi
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  4. M. Nakazawa
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  5. J. Kawarabayashi
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  6. Y. Hirata
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  7. T. Numazawa
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  8. T. Haga
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Received: 7 July 1999/Accepted: 29 September 1999

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Inoue, M., Fukuda, D., Takahashi, H. et al. Development of new position sensitive electron multiplication device fabricated by LIGA process. Microsystem Technologies 6, 90–93 (2000). https://doi.org/10.1007/s005420050004

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  • DOI: https://doi.org/10.1007/s005420050004

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