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Metal oxide gas sensor for high temperature application

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Abstract

 The present study is focused on the development of a gas sensor for application in a high temperature environment. The sensor has been realised using thin films prepared on silicon substrates including a high temperature stable heating and wiring system. TiO2 acts as sensitive layer. Measurements have been carried out in synthetic gas mixtures as well as in gases in a given application. Neural networks and multivariate data analysis have been used for determining the gas concentrations. The capability to detect CO, NO x , and toluene is shown.

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Authors and Affiliations

  1. Technische Universität Chemnitz, Zentrum für Mikrotechnologien, D-09107 Chemnitz, Germany, , , , , , DE

    T. Gessner

  2. Technische Universität Chemnitz, Zentrum für Mikrotechnologien, D-09107 Chemnitz, Germany, , , , , , DE

    K. Gottfried, R. Hoffmann, C. Kaufmann & U. Weiss

  3. Otto-von-Guericke-Universität Magdeburg, Institut für Mikro- und Sensorsysteme, Postfach 4120, D-39016 Magdeburg, Germany, , , , , , DE

    E. Charetdinov, P. Hauptmann, R. Lucklum & B. Zimmermann

  4. GPP Chemnitz mbH, Straßburger Str. 3, D-09120 Chemnitz, Germany, , , , , , DE

    U. Dietel, G. Springer & M. Vogel

Authors
  1. T. Gessner
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  2. K. Gottfried
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  3. R. Hoffmann
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  4. C. Kaufmann
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  5. U. Weiss
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  6. E. Charetdinov
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  7. P. Hauptmann
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  8. R. Lucklum
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  9. B. Zimmermann
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  10. U. Dietel
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  11. G. Springer
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  12. M. Vogel
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Additional information

Received: 3 February 2000/Accepted: 3 February 2000

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Gessner, T., Gottfried, K., Hoffmann, R. et al. Metal oxide gas sensor for high temperature application. Microsystem Technologies 6, 169–174 (2000). https://doi.org/10.1007/s005420000048

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  • DOI: https://doi.org/10.1007/s005420000048

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