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Zone-Plate Interferometer for Measuring the Shape Error of Mirrors with Large Numerical Aperture and Steep Asphericity

  • OPTICAL SYSTEMS AND TECHNOLOGIES
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Abstract

A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (0, 0) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.

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Authors and Affiliations

  1. Department of Mechanical Systems Engineering, Faculty of Engineering, Toyama Prefectural University, Kosugimachi Toyama, 939-03, Japan

    Takashi Nomura, Kazuhide Kamiya & Hiroshi Miyashiro

  2. Department of Mechanical Systems Engineering, Faculty of Engineering, Toyama University, Gofuku, Toyama, 3190, Japan

    Hatsuzo Tashiro & Kazuo Yoshikawa

Authors
  1. Takashi Nomura
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  2. Kazuhide Kamiya
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  3. Hiroshi Miyashiro
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  4. Hatsuzo Tashiro
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  5. Kazuo Yoshikawa
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Additional information

Presented at the International Commission for Optics Topical Meeting, Kyoto, 1994.

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Nomura, T., Kamiya, K., Miyashiro, H. et al. Zone-Plate Interferometer for Measuring the Shape Error of Mirrors with Large Numerical Aperture and Steep Asphericity. OPT REV 3, 34–37 (1996). https://doi.org/10.1007/s10043-996-0034-5

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  • DOI: https://doi.org/10.1007/s10043-996-0034-5

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