Electron beam tester measurements of switching noise in VLSI circuits

https://doi.org/10.1016/0167-9317(91)90158-AGet rights and content

Abstract

Electron beam testers can be used to measure the noise generated on power supply voltages by the operation of VLSI circuits. The power supply busses on the circuit are probed by the electron beam, resulting in a time-dependent voltage waveform. This method of measurement assures that the noise is measured near the active circuit, where its impact on the circuit is most easily assessed. Examples are presented to illustrate the mechanism of noise generation and the use of an E-beam tester to measure the noise.

References (9)

  • E. Wolfgang

    Electron beam testing

    Microelectron. Eng.

    (1986)
  • H.P. Feuerbaum

    Electron beam testing: Methods and applications

    Scanning

    (1983)
  • Y. Itoh et al.

    Noise-generation analysis and noise-suppression design techniques in megabit DRAM's

    IEEE J. Solid-State Circuits

    (August 1987)
  • T. Gabara

    Reduced ground bounce and improved latchup-suppression through substrate conduction

    IEEE J. Solid-State Circuits

    (1988)
There are more references available in the full text version of this article.

Cited by (5)

1

Keith A. Jenkins received a PhD in Physics from Columbia University, for work done in experimental high-energy physics. He continued in this field at The Rockefeller University, until he joined the IBM Research Division at the T.J. Watson Research Center, where he first worked in Josephson technology. He is now a member of the Silicon Technology Department, where his current activities include research in high-frequency measurementtechniques, electron beam circuit testing, radiation-device interactions, and low-temperature electronics.

2

David F. Heidel received his BS degree in Physics from Miami University in 1974, and his MS and PhD degrees in Physics from the Ohio State University in 1976 and 1980 respectively. In 1980, he joined IBM's Thomas J. Watson Research Center, Yorktown Heights, NY, working on Josephson Technology. Since 1984, he has been working on testing of silicon devices and is presently the manager of the Test Systems Group in the Silicon Technology Department.

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