Progress in ion projection lithography
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Cited by (14)
Prospects of ion projection techniques for maskless implantation at high ion energies
2002, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsStencil masks for high energy ion projection
1999, Microelectronic EngineeringCapability of ion beam projection optics for microfabrication
1999, Microelectronic EngineeringHigh energy implantation by ion projection
1998, Microelectronic EngineeringIon projector distortion stability and wafer exposures under electronic alignment ("pattern lock") conditions
1993, Microelectronic Engineering
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