VacuumVolume 42, Issue 16, 1991, Pages 1041-1042AbstractDeposition of aSi:H using a supersonically expanding argon plasmaAuthor links open overlay panelGJ Meeusen, Z Qing, ATM Wibers, CJ Timmermans, DC SchramShow moreShareCitehttps://doi.org/10.1016/0042-207X(91)91270-XGet rights and contentRecommended articlesReferences (0)Cited by (0)View full textCopyright © 1991 Published by Elsevier Ltd.