Diaphragm pumps down to 2 mbar and their application in nuclear physics
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Phys Rev
(1989)- Alcatel, Spiromolekularpumpen MDP 5010, MDP 5030 CP data sheet, Wertheim,...
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Cited by (2)
Handbook of Physical Vapor Deposition (PVD) Processing
2007, Handbook of Physical Vapor Deposition (PVD) Processing
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