Some experimental studies on metal implantation

doi:10.1016/0029-554X(81)90821-1

Nuclear Instruments and Methods

Volumes 182–183, Part 2, 15 April–1 May 1981, Pages 915-917

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Abstract

Some experiments on the ion implantation of metals and alloys have been performed by this group during the past year. The study so far has been preliminary, with the main purpose of exploring the possibility of applying the ion implantation process as a means of beneficially modifying metallic materials.

References (1)

N.E.W. Hartley

Cited by (25)

A study on the surface structures and properties of Ni-free Zr-based bulk metallic glasses after Ar and Ca ion implantation
2013, Intermetallics
Citation Excerpt :
The Ar or Ca ion implantation has appeared to improve the corrosion resistance of the Zr-based BMG alloys in the PBS solution, in comparison with the as-cast samples. This improvement can be attributed to the alterations of the structure and the chemical composition (film formation) of the BMG’s-implanted layer due to ion implantation [29,30]. In the corrosion experiments of the as-cast samples, constituent elements, Zr and Al, are more preferable to be dissolved in the PBS solution, as compared with Cu and Ag.
Ca or Ar implantation was performed on a Zr₄₆Cu_37.636Al_8.364Ag₈ (in atomic percent) bulk metallic glass (BMG) at 10 keV with a fluence of 8 × 10¹⁵ cm^-2. The effects of ion implantation on the surface microstructure, nano-hardness, and corrosion behavior of the Zr-based BMG have been studied. The results showed that the BMG specimen maintained an amorphous structure after Ar or Ca ion implantation. The thermodynamic stabilities were altered by ion implantation, and the relaxation of an amorphous structure is shown. The surface nano-hardness and corrosion resistance were enhanced after ion implantation. The efficient improvement of the surface performance by ion implantation on BMGs was analyzed and discussed.
Wear resistance of boron nitride coated metal
1993, Nuclear Inst. and Methods in Physics Research, B
The wear resistance of boron nitride films was studied. The films of 1 μm thickness were prepared on the surface of a cutting tool by simultaneous nitrogen ion irradiation and vapor depositon of boron; the Vickers hardness of the films was between 3000 and 5000 kg/mm². The test was performed by the cutting of steel. On the tool deposited directly, the wear of the surface is large and this could not be improved greatly. However, the tools prepared after nitridation of the surface layer by ion implantation and the one with another nitride layer in the interface showed decreasing wear, and the wear of the tool with an interlayer of silicon nitride could be decreased to about 15%. As a result, it became clear that boron nitride could be effectively used as a highly hard film by the optimization of the interface between the film and the matrix.
High dose implantation of nitrogen in tool steel: Auger electron spectroscopy and hardness measurements
1993, Thin Solid Films
Tool steel samples were implanted with 100 keV N⁺ ions at liquid nitrogen temperature to doses of 3 × 10¹⁷ and 1 × 10¹⁸cm⁻². Only the dose of 1 × 10^18cm⁻² caused a significant hardening effect. Two mechanisms contributed to this hardness increase, namely nitride formation and radiatin damage. Cooling during implantation caused additional hardening, owing to a martensitic phase transformation. The projected range (R_p = 110 nm) for the implanted species was obtained by Auger sputter depth profiling. If the hardened layer thickness was taken as 2R_p, then the Jönsson-Hogmark model gave an average hardness value of 2010 HV for the implanted layer. However, a more realistic value of 900 HV was calculated under the assumption that typical radiation damage profiles (R_d = 3R_p) contributed to the hard film thickness. It is difficult to judge the accuracy of the model for predicting the correct absolute hardness of the implanted layer but it is shown that deep radiation-induced damage plays a major role in surface hardening.
Hardness depth profile of lattice strained cemented carbide modified by high-energy boron ion implantation
1991, Nuclear Inst. and Methods in Physics Research, B
The hardness depth profiles of cemented carbides which were implanted with high-energy B⁺ ions have been estimated using a dynamic microhardness tester. The B⁺ implantations into (16% Co)-cemented WC alloys were carried out under conditions where the implantation energies were 1–3 MeV and the fluences 1 × 10¹⁷−1 × 10¹⁸ions/cm². The profiles show that the implanted layer becomes harder as fluences are chosen at higher values and there is a peak at a certain depth which depends on the implantation energy. In X-ray diffraction (XRD) studies of the implanted surface the broadened refraction peaks of only WC and Co are detected and the increments of lattice strain and of residual stress in the near-surface region are observed. It is supposed that the hardening effect should be induced by an increase in residual stress produced by lattice strain. The hardness depth profile in successive implantation of ions with different energies agrees with the compounded profile of each one of the implantations. It is concluded that the hardness depth profile can be controlled under adequate conditions of implantation.
Modification of physico-mechanical properties of metals and metallic coatings by ion implantation
1991, Vacuum
The experimental results are reviewed on ion-induced physico-mechanical property modification (microhardness, wear resistance, friction) of metals and metallic coatings as a function of bombarding parameters such as energies in the range to 150 keV, implantation doses 10¹⁵–10¹⁸ cm⁻², and ion species: chemically active gases (nitrogen), noble gases (argon), their mixtures (argon/nitrogen, nitrogen/hydrogen), and solid ions B⁺, C⁺, Cu⁺, W⁺, etc. The materials under study were transition- or structural-metals such as Ti and its alloys, Ta, Ni, Mo, Al, steel, etc., and metallic films of Al, Mo, Ta, Cr, etc., which had been deposited on substrates of glass, silicon and such others to a depth between 20–30 and 150–300 nm. The results on the microhardness-depth profiles for ion-implanted samples and the experimental test of the proposed two-layer nitrogen-assisted microhardness model have been reported. Optimum implantation parameters and possible mechanisms for modified tribological properties of metals are discussed.
Microstructure and hardness of titanium and iron surfaces after megaelectronvolt nitrogen implantation
1989, Materials Science and Engineering A
Effects of MeV N⁺ implantation in titanium and iron surfaces on the microstructure and hardening have been examined. In both metals, high nitrogen concentrations could easily be built up over a depth of about 1 μm, as observed with Rutherford backscattering spectrometry. Nitride formation was demonstrated by X-ray diffraction, both in titanium and iron. Hardness measurements indicated that the load-carrying abilities of unimplanted or even low energy nitrogen implanted specimens could be enhanced significantly by MeV implantation. In 1 MeV irradiated titanium, for example, an increase in surface hardness of 30% using a load as heavy as 100 g was observed, while no hardening effects could be detected using this load on 35–200 keV implanted specimens.
MeV implantation of titanium induced some surface texturing, whereas iron surfaces remained smooth. At doses higher than 0.65 × 10¹⁸ cm⁻² blisters appeared at the iron surface and at even higher doses the apparent nitrogen peak concentration showed a saturation effect.

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VII. Ion-implanted metalsSome experimental studies on metal implantation

Abstract

VII. Ion-implanted metals
Some experimental studies on metal implantation