An ERD/RBS/PIXE apparatus for surface analysis and channeling

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Abstract

A system for surface analysis, lattice localisation of impurities, defect studies in crystalline solids and routine ERD (elastic recoil detection) is described. The apparatus features a high vacuum chamber, a computer controlled precision goniometer and an energy plus time-of-flight mass discrimination system. First results of channeling/ERD experiments using 15–30 MeV 35Cl beams on silicon crystals implanted with B+ and BF2+ are presented, as well as data on the effect of beam induced damage on the boron distribution.

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    On leave from John Abbott College, St. Anne De Bellevue, Quebec, Canada H9X 3L9.

    ∗∗

    On leave from Vanier College, 821 Ste-Croix Blvd., St. Laurent, Quebec, Canada H4L 3X9.

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