A method for analysis and profiling of boron, carbon and oxygen impurities in semiconductor wafers by recoil atoms in heavy ion beams
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Cited by (53)
ERDA at the 9 MV Tandem and at the 3 MV Tandetron of IFIN-HH
2017, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :This article presents the newest results of a work based on the experience accumulated in more than 30 years of research activity using ERDA technique in IFIN-HH. In 1984 an experimental setup for recoil spectroscopy, based on a compact ΔE(gas)–Er(solid) telescope, was developed at the Heavy Ion Department of IFIN-HH [2]. The telescope presented in Fig. 1, consists in both a ΔE pulse-ionization chamber and a residual energy Er silicon detector placed at the end of the ionization chamber.
Development of ΔE-E telescope ERDA with 40 MeV <sup>35</sup>Cl<sup>7+</sup> beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films
2016, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :Recently, the performance of the particle identification of TOF-E ERDA has been intensively improved, so that one can distinguish also the light metals in thin films [8–11], meanwhile the system has become rather sophisticated and expensive. Another choice for the particle identification is the conventional ΔE-E telescope ERDA system equipped with a gas ionization chamber [12]. As long as we concentrate our attention into the determination of O and N ratio in the metal oxynitrides, the conventional ΔE-E telescope ERDA is still useful.
Identification of hydrogen and helium in elastic recoil detection measurements using a compact (ΔE - E<inf>r</inf>) ionization chamber
2006, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :Simultaneous measurement of many elements is highly desirable, since in this case no other parameters such as collected charge are needed for the analysis of the data. In IFIN at the Nuclear Physics Department we started almost 18 years ago to use our 8.5 MV tandem accelerator for material analysis [2]. An ERDA beam line equipped with a dedicated target chamber has been installed.
Ion beam and complementary SEM and XRD characterization of YBa<inf>2</inf>Cu<inf>3</inf>O<inf>7-x</inf> films obtained by pulsed laser deposition
2006, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsComplementary use of ERDA and RBS/C for the determination of implanted atom and damage distributions in spinel
2005, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :A 80 MeV 63Cu beam was used. The detection of recoil atoms was made by using a compact ΔE–E telescope, consisting of a ΔE ionization chamber and a residual energy silicon detector [10]. The gains of the amplifiers were adjusted to yield convenient pulse heights for light (H, He) and medium (C, O, Mg, Al) mass elements.
Ion-beam characterization of He implanted into nuclear matrices
2004, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms