Progress in target technology using a pulsed laser beam for physical vapor deposition

https://doi.org/10.1016/0168-9002(91)90783-MGet rights and content

Abstract

For the preparation of isotopic accelerator targets by means of an evaporation-condensation process, laser heating is a method with high efficiency and thus low consumption of expensive isotope materials. A Q-switched, pulsed Nd: YAG laser is utilized for the ablation of refractory metals, which are deposited on substrates in a vacuum of 10−5 Pa. Even for metals with low vapor pressures at their melting points, high ablation rates nearly independent of the vapor pressure can be obtained with laser pulses of 300 mJ within 10 ns. With an average laser power of 3 W, deposition rates for various metals were measured. With a source to substrate distance of 5 cm, condensation rates varied only from 70–300 ngcm−2 s−1 for the wide range of elements with lower vapor pressures from boron to uranium.

References (9)

  • G. Sletten et al.

    Nucl. Instr. and Meth.

    (1972)
  • P. Maier-Komor

    Nucl. Instr. and Meth.

    (1979)
  • P. Maier-Komor

    Nucl. Instr. and Meth.

    (1989)
  • G. Dollinger et al.

    Nucl. Instr. and Meth.

    (1991)
There are more references available in the full text version of this article.

Cited by (6)

  • Fabrication of <sup>184</sup>W target on carbon backing

    2008, Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
  • Isotopic <sup>13</sup>C target foils 0.4-2.2 mg/cm<sup>2</sup> by pyrolysis of methane, with alternative methods of production

    2006, Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
  • Stacked tungsten-carbon targets

    2004, Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
  • Stretched chromium foils

    2002, Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
View full text