Damage production in Si by MeV carbon cluster irradiation
References (23)
- et al.
Nucl. Instr. and Meth. B
(1988) - et al.
Nucl. Instr. and Meth. B
(1991) - et al.
Nucl. Instr. and Meth. B
(1991) - et al.
Nucl. Instr. and Meth. B
(1992) - et al.
Appl. Surf. Sci.
(1989) - et al.
Nucl. Instr. and Meth. B
(1992) - et al.
Nucl. Instr. and Meth. B
(1993) - et al.
Nucl. Instr. and Meth. B
(1992) - et al.
Nucl. Instr. and Meth. B
(1992) - et al.
Phys. Rev. Let.
Cited by (27)
Inducing large ferromagnetic ordering in graphite by 1 MeV <sup>12</sup>C <sup>+</sup> ion irradiation
2012, CarbonCitation Excerpt :The defect density may therefore be significantly lower than that given by SRIM at higher fluences. Döbeli et al. experimentally observed saturation of defect concentration at the end of the range for carbon ion bombarding on silicon [29]. For energies and fluences similar to those used in our experiments, the defect concentration at the end of the range saturates between 1–3% as inferred from ‘Channeling Rutherford backscattering spectrometry’.
Low energy C<inf>n</inf> cluster ion induced damage effects in Si(1 0 0) substrates
2007, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :In a later work [5], they have looked at the same effect, viz the production of F-centers and their aggregation to F2-centers at various fluence of C5 implantation at 8.7 MeV. In a similar work, Dobeli et al. [6] had carried out a systematic study of MeV C and Ge cluster induced defect production in Si. Channeling Rutherford backscattering spectrometry (C-RBS) measurement were used to characterize the samples.
Ion beam mixing of an embedded Ta marker layer in Si induced by Al<inf>3</inf>, Cu<inf>2</inf> and Ge<inf>2</inf> clusters
2006, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsSTM observation of cluster size dependence of HOPG surface damages induced by energetic Si<inf>n</inf> and Ge<inf>n</inf> clusters
2006, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsSecondary ion emissions from carbon nanotubes induced by MeV Si and Si <inf>2</inf> clusters
2004, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsSmall cluster ions from source of negative ions by cesium sputtering
2002, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms