Fabrication of microchannels by laser machining and anisotropic etching of silicon
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2019, International Journal of Thermal SciencesCitation Excerpt :In addition, laser-based techniques were also explored extensively to fabricate microholes, microchannels on silicon wafer. Alavi et al. [25] fabricated silicon microchannels combining the laser and etching techniques. An experimental attempt was made by Li et al. [26] to fabricate 3D – silicon microchannels using femtosecond laser.
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2018, Sensors and Actuators, B: ChemicalCitation Excerpt :Some of the problems offered by etching techniques can be confronted by modification and combination of various approaches. For example, Alavi et al. [161] used laser machining with the etching process to achieve high aspect ratio within the structure which used to be limited because of the inherent characteristics of combination of photomicrography and etching process. Similarly, to work with mask-less procedures and eliminate use of expensive process like photo-lithography in structuring of graphene oxide nanosheets, Zhou et al. [162] have successfully demonstrated the use of laser etching techniques which is relatively fast and offers easy process control.
Fast growth synthesis of mesoporous germanium films by high frequency bipolar electrochemical etching
2017, Electrochimica ActaCitation Excerpt :The pore morphologies, as depicted in Fig. 4d, display few general trends: (i) As porous Si [33], the pore diameter increases with increasing current density. The same anisotropic etching was also observed in Ge by using H2O2 containing solutions [34] and in Si by using laser beams etching [35]. It was found that the anisotropic character of the etching process is manifested by the fact that (111) surfaces are etched at a much slower rate than all other crystallographic planes.
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