Design and fabrication of resonating AT-quartz diaphragms as pressure transducers

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Abstract

A novel design of a quartz-diaphragm pressure transducer, realized with an AT crystal cut, is described. The resonator consists of a bossed and grooved diaphragm structure monolithically attached to a quartz frame. Finite-element modelling has been carried out to determine the dynamic behaviour of the structure and the electrode configurations for exciting a low-frequency bending resonance mode. The selectivity of this vibration mode due to a barometric pressure change manifests itself as a very sensitive and stable frequency-shift response. Several diaphragm structures and electrode layouts have been fabricated employing a specially developed low-cost batch-manufacturing method combined with a laser process. The dynamic properties of the resonating diaphragms are experimentally characterized by optical measurements. In hybrid packaging, the structures are used as oscillator-driven sensor prototypes.

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