Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model
References (19)
- et al.
ASEP: a CAD program for silicon anisotropic etching
Sensors and Actuators A
(1991) - et al.
Anisotropic crystal etching - a simulation program
Sensors and Actuators A
(1992) Computer simulation of anisotropic crystal etching
Sensors and Actuators A
(1992)- et al.
Fabrication of microchannels by laser machining and anisotropic etching of silicon
Sensors and Actuators A
(1992) Universality and complexity in cellular automata
Physica
(1984)Exploiting regularities in large cellular spaces
Physica
(1984)Silicon as a mechanical material
Proc. IEEE
(1982)- J. Frühauf, Simulation of orientation dependent etching of masked silicon substrates, Tech. Digest, Micromechanics...
- J.N. Shepherd, Prediction of anisotropic etching in (100) silicon, Tech. Digest, Micromechanics Europe '90, Berlin,...
There are more references available in the full text version of this article.
Cited by (0)
Copyright © 1994 Published by Elsevier B.V.