Determination of line profile on nanostructured surfaces using EUV and x-ray scattering
| Author: | Victor Soltwisch, Jan Wernecke, Anton Haase, Jürgen Probst, Max Schoengen, Frank Scholze, Jan Pomplun, Sven BurgerORCiD |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | Proc. SPIE |
| Volume: | 9235 |
| First Page: | 92351D |
| Year of first publication: | 2014 |
| DOI: | https://doi.org/10.1117/12.2066165 |
