On aberration retrieval for optical microscopes in length metrology
| Author: | Jan Krüger, Bernd Bodermann, Rainer Köning, Phillip Manley, Lin Zschiedrich, Philipp-Immanuel Schneider, Andreas Heinrich, Christian Eder, Ulrike Zeiser, Aksel Goehnermeier |
|---|---|
| Document Type: | In Proceedings |
| Parent Title (English): | Proc. SPIE |
| Volume: | PC12619 |
| First Page: | PC126190A |
| Year of first publication: | 2023 |
| DOI: | https://doi.org/10.1117/12.2672294 |
