Fabrication uncertainty aware and robust design optimization of a photonic crystal nanobeam cavity by using Gaussian processes
| Author: | Matthias Plock, Felix Binkowski, Lin Zschiedrich, Phillip-Immanuel Schneider, Sven Burger |
|---|---|
| Document Type: | Article |
| Parent Title (English): | J. Opt. Soc. Am. B |
| Volume: | 41 |
| First Page: | 850 |
| Year of first publication: | 2024 |
| ArXiv Id: | http://arxiv.org/abs/2402.09420 |
| DOI: | https://doi.org/10.1364/JOSAB.505767 |
