Abstract
We measured the absolute photo-emission cross section of the BC ℓ A → X system around 2720 Å produced by electron-impact dissociation of BCℓ3. The cross section reaches a maximum around 40 eV with a value of 2.5±0.5 × 10−18 cm2. A double-onset structure with onsets around 14 eV and 26 eV indicates that the excited BCℓ fragments are produced via two different dissociation channels.
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References
R.H. Burton, R.A. Gottscho and G. Smolinsky in Dry Etching for Microelectronics, ed. R.A. Powell (Elsevier: New York 1984) and earlier references therein
R.A. Gottscho, G.R. Scheller, T. Intrator and D.B. Graves, Bull. Am. Phys. Soc.33, 134 (1988) and R.A. Gottscho, private communications (1987, 1988)
K. Miller Jr. and K. Becker, Can. J. Phys.65, 530 (1987)
K.A. Blanks, A.E. Tabor and K. Becker, J. Chem. Phys.86, 4871 (1987)
Z.J. Jabbour, K.E. Martus and K. Becker, Bull. Am. Phys. Soc.33, 941 (1988)
R.W.B. Pearse and A.G. Gaydon, The Identification and Molecular Spectra (Wiley: New York 1941)
JANAF, Thermochemical Tables, 2nd ed. Natl. Stand. Ref. Data Ser., Natl. Bur. Stand.37 (US GPO, Washington, D.C., 1970)
Ionization Potentials, Appearance Potentials and Heats of Formation of Gaseous Positive Ions, Natl. Stand. Ref. Data Ser., Natl. Bur. Stand.26 (US GPO, Washington, D.C. 1969)
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Jabbour, Z.J., Martus, K.E. & Becker, K. Absolute photo-emission cross section of the BClA 1Π →X 1Σ+ system produced by dissociative electron impact on BCl3 . Z Phys D - Atoms, Molecules and Clusters 9, 263–264 (1988). https://doi.org/10.1007/BF01438298
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DOI: https://doi.org/10.1007/BF01438298