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Some factors influencing the formation of reaction-bonded silicon nitride

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Abstract

Several salient factors influencing the formation of reaction-bonded silicon nitride (RBSN) compacts have been studied. These include the effects of mullite and alumina furnace tubes typically employed during “high-purity” nitridation studies, pre-sintering of green silicon compacts, free powder versus compact nitridation, and the influence of metal/metal oxide additions. The latter studies have provided experimental evidence for enhancement due to dissociated nitrogen, and suggest that (1) β-Si3N4 formation does not necessarily require a liquid phase, (2) atomic nitrogen stimulates β-phase formation, and (3) the liquid phase provides an efficient source for volatile silicon, promoting α-Si3N4. These conclusions are consistent with accepted mechanisms for the formation of the two phases.

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Authors and Affiliations

  1. Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA

    R. G. Pigeon & A. Varma

  2. Department of Electrical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA

    A. E. Miller

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  1. R. G. Pigeon
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  2. A. Varma
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  3. A. E. Miller
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Pigeon, R.G., Varma, A. & Miller, A.E. Some factors influencing the formation of reaction-bonded silicon nitride. J Mater Sci 28, 1919–1936 (1993). https://doi.org/10.1007/BF00595765

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