Abstract
Highly oriented thin films exhibiting transparent conduction aluminium-doped ZnO (AZO), were prepared by a spin-coating method. The effects of the solvents on the preparation and electrical properties of the thin films were examined. The thin films were formed on quartz glass substrates by spin-coating into a selected solution and calcining at 700 °C for 5 h. The thin films had a resistivity of ρ (Ω cm)=1.5 after heat treatment in an air atmosphere, and 1.5 × 10−3 Ω cm in a reducing atmosphere, and a transmission of about 85% in the visible light region. The differences in the high orientation and the conductivities were attributed to a chelate formation in the aluminium-doped ZnO due to the solvent effect.
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Nishio, K., Miyake, S., Sei, T. et al. Preparation of highly oriented thin film exhibiting transparent conduction by the sol-gel process. JOURNAL OF MATERIALS SCIENCE 31, 3651–3656 (1996). https://doi.org/10.1007/BF00352774
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DOI: https://doi.org/10.1007/BF00352774