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High dielectric constant of SrTiO3 thin films prepared by chemical process

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Abstract

SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700°C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. SrTiO3 thin films were found to have paraelectric properties with C-V characteristics.

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Authors and Affiliations

  1. Department of Chemistry, Federal University of São Carlos-UFSCar, Caixa Postal 676, 13560-905, São Carlos, SP, Brazil

    F. M. Pontes, E. J. H. Lee, E. R. Leite & E. Longo

  2. Institute of Chemistry, UNESP, Caixa Postal 355, 14801-970, Araraquara, SP, Brazil

    J. A. Varela

Authors
  1. F. M. Pontes
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  2. E. J. H. Lee
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  3. E. R. Leite
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  4. E. Longo
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  5. J. A. Varela
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Pontes, F.M., Lee, E.J.H., Leite, E.R. et al. High dielectric constant of SrTiO3 thin films prepared by chemical process. Journal of Materials Science 35, 4783–4787 (2000). https://doi.org/10.1023/A:1004816611050

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