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Ion-beam sputtering apparatus for deposition of multilayered films

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Industrial Chemistry, Faculty of Technology, Tokyo University of Agriculture and Technology, 184, Koganei, Tokyo, Japan

    T. Suzuki, T. Yamazaki, K. Takahashi, T. Kageyama & H. Oda

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  1. T. Suzuki
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  2. T. Yamazaki
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  3. K. Takahashi
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  4. T. Kageyama
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  5. H. Oda
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Suzuki, T., Yamazaki, T., Takahashi, K. et al. Ion-beam sputtering apparatus for deposition of multilayered films. J Mater Sci Lett 7, 79–80 (1988). https://doi.org/10.1007/BF01729923

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  • DOI: https://doi.org/10.1007/BF01729923

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