Abstract
The use of proton resonance backscattering spectrometry for the estimation of carbon as thin films formed on a target material is discussed. Conventional He backscattering experiments were also carried out on TiVN films formed on beryllium backing but the determination of stoichiometry of these films were difficult using conventional software for depth resolution.
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Ramana, J.V., Raju, V.S. & Gangadharan, S. Thin film characterisation using backscattering spectrometry. J Radioanal Nucl Chem 217, 293–295 (1997). https://doi.org/10.1007/BF02034459
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DOI: https://doi.org/10.1007/BF02034459