Summary
Some limitation problems for gas discharge excimer lasers, when scaled to a high pulsed energy output with high repetition rate are discussed. As an example, we present some experimental results obtained with an X-ray preionized (10×10×100) cm3 active volume, low-repetition-rate-operated gas discharge XeCl laser system.
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Letardi, T., Bollanti, S., Di Lazzaro, P. et al. Some design limitations for large-aperture high-energy per pulse excimer lasers. Il Nuovo Cimento D 14, 495–507 (1992). https://doi.org/10.1007/BF02457039
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DOI: https://doi.org/10.1007/BF02457039