Skip to main content
SpringerLink
Log in

Microwave characterization of YBa2Cu3O7−x thin films grownin situ by Off-axis magnetron sputtering

  • Published:
Il Nuovo Cimento D

Summary

Superconducting films of YBa2Cu3O7−x were depositedin situ on LaAlO3 substrates using single-target 90° off-axis sputtering. The obtained films have tipicalT c values of 91K. Surface resistance measurements on as-grown films reach 1.1 mΩ at 77K and 10GHz; whilst on ion-etched patterned resonant linesR s (77K, 10GHz) it is about 10mΩ.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Dijkkamp, T. Venkatesan, X. D. Wu, S. A. Shaheen, N. Jisrawi, Y. H. Min-Lee, W. L. McLean andM. Croft:Appl. Phys. Lett.,51, 619 (1987).

    Article  ADS  Google Scholar 

  2. S. Witanachchi, H. S. Kwok, X. W. Wang andD. T. Shaw:Appl. Phys. Lett.,53, 234 (1988).

    Article  ADS  Google Scholar 

  3. T. Terashima, K. Iijima, K. Yamamoto, Y. Bando andH. Mazaki:Jpn. J. Appl. Phys.,27, L91 (1988).

    Article  ADS  Google Scholar 

  4. N. Missert, R. Hammond, J. E. Mooij, V. Matijasevic, P. Rosenthal, E. Garwin, T. H. Geballe, A. Kapitulnik, M. R. Beasely, S. S. Laderman, C. Lu andR. Barton:IEEE Trans. Magn.,25, 2418 (1989).

    Article  ADS  Google Scholar 

  5. H. C. Li, G. Linker, F. Ratzel, R. Smithey andJ. Geerk:Appl. Phys. Lett.,52, 444 (1988).

    Google Scholar 

  6. R. L. Sandstrom, W. J. Gallagher, T. R. Dinger andR. H. Koch:Appl. Phys. Lett.,53, 444 (1988).

    Article  ADS  Google Scholar 

  7. C. B. Eom, J. Z. Sun, K. Yamamoto, A. F. Marshall, K. E. Luther, S. S. Laderman andT. H. Geballe:Appl. Phys. Lett.,55, 595 (1989).

    Article  ADS  Google Scholar 

  8. J. Kwo, M. Hong, D. J. Trevor, R. M. Fleming, A. E. White, R. C. Farrow A. R. Kortan andK. T. Short:Appl. Phys. Lett.,53, 234 (1988).

    Article  Google Scholar 

  9. H. Adachi, K. Hirochi, K. Setsune, M. Kitabatake andK. Wasa:Appl. Phys. Lett.,51, 2263 (1989).

    Article  ADS  Google Scholar 

  10. M. Kawasaki, S. Nagata, Y. Sato, M. Funabashi, T. Hasegawa, K. Kishio, K. Kitazawa, K. Fueki andH. Koinuma:Jpn. J. Appl. Phys.,26, L736 (1987).

    Article  Google Scholar 

  11. H. U. Muller, J. P. Muller, F. Ludwig andG. Ehlers:J. Alloys Comp.,195 267 (1993).

    Article  Google Scholar 

  12. F. Celani, A. Saggese, S. Pace, L. Liberatori andN. Sparvieri:Mater. Chem. Phys.,25, 43 (1990).

    Article  Google Scholar 

  13. R. Bormann andJ. Nolting:Appl. Phys. Lett.,54, 2150 (1989).

    Article  ADS  Google Scholar 

  14. R. H. Hammond andR. Bormann:Physica C,162–164, 703 (1989).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Direzione Ricerche, Alenia, Via Tiburtina km 12.4, 00131, Roma, Italy

    N. Sparvieri, A. M. Fiorello & L. Marescialli

  2. CRIS, Via Argine 425, 80147, Napoli, Italy

    M. Ambrico

Authors
  1. N. Sparvieri
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. M. Fiorello
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. Marescialli
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Ambrico
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sparvieri, N., Fiorello, A.M., Marescialli, L. et al. Microwave characterization of YBa2Cu3O7−x thin films grownin situ by Off-axis magnetron sputtering. Nouv Cim D 16, 2005–2010 (1994). https://doi.org/10.1007/BF02471859

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02471859

PACS 74.75

PACS 84.30.Ey

PACS 01.30.Cc

Search

Navigation