Skip to main content
Log in

Substantial diffusion of Zr during solid-state amorphization in Ni/Zr multilayers

  • Papers
  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

To examine the proposed model that amorphization is achieved by the motion of one species only, Ni/Zr multilayers have been prepared by sputter deposition at a pressure of 1 Pa. The as-deposited specimen shows the planar and sharp interface between Ni and Zr layers. The amorphous phase is clearly observed at the residual Ni layers and around the void edge in the Zr layer from the cross-sectional TEM images of the samples annealed at 300 ‡C for 1 h. Composition analysis verifies that considerable Zr diffusion occurs through the grain boundary in the Ni layer during the annealing. The activation energy for amorphization is determined to be 1.17 eV per atom through a Kissinger-type analysis. This paper clearly shows the formation of amorphous NiZr alloys when Zr diffusion is comparable to Ni diffusion.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. R. B. SCHWARZ and W. L. JOHNSON, Phys. Rev. Lett. 51 (1983) 415.

    Google Scholar 

  2. W. L. JOHNSON, Prog. Mater. Sci. 30 (1986) 81.

    Google Scholar 

  3. K. SAMWER, Phys. Reports 161 (1988) 1.

    Google Scholar 

  4. W. L. JOHNSON, in Materials Interfaces, edited by D. WOLF and S. YIP (Chapman & Hall, New York, 1992).

    Google Scholar 

  5. Y. T. CHENG, W. L. JOHNSON and M. A. NICOLET, Appl. Phys. Lett. 47 (1985) 800.

    CAS  PubMed  Google Scholar 

  6. W. J. MENG, C. W. NIEH and W. L. JOHNSON, Mater. Sci. Engng. 97 (1988) 87.

    Google Scholar 

  7. S. B. NEWCOMB and K. N. TU, Appl. Phys. Lett. 48 (1986) 1436.

    Google Scholar 

  8. D. W. HOFFMAN and J. A. THORNTON, J. Vac. Sci. Technol. 16 (1979) 134.

    Google Scholar 

  9. H. E. KISSINGER, Anal. Chem. 29 (1957) 1702.

    Google Scholar 

  10. E. J. COTTS, W. J. MENG and W. L. JOHNSON, Phys. Rev. Lett. 57 (1986) 2295.

    Google Scholar 

  11. R. J. HIGHMORE, J. E. EVETTS, A. L. GREER and R. E. SOMEKH, Appl. Phys. Lett. 50 (1987) 566.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Chang, SG., Lee, KY., Yong, YJ. et al. Substantial diffusion of Zr during solid-state amorphization in Ni/Zr multilayers. J Mater Sci: Mater Electron 7, 47–50 (1996). https://doi.org/10.1007/BF00194092

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00194092

Keywords

Navigation