Abstract
Alternate layers of Al2O3 and ZrO2 nanocomposite films were prepared on silicon wafers and glass substrates at room temperature using the electrostatic self-assembly monolayer (ESAM) process. The versatile approach of the ESAM process provides the possibility of integrating diverse inorganic colloids on the nanosize level in a layer-by-layer or block-by-block fashion. Further, it allows the combination of inorganic colloids and organic molecules, making it possible to fabricate thick films with large pores and good stress relaxation. Highly ordered, micron-thick films have been formed, sintered, and characterized by scanning electron microscopy and ellipsometry. There is no significant visible crack formation for Al2O3–ZrO2 composite films after heat treatment at 1200°C for 2 h, although significant thickness reduction occurs. The hardness and Young's modulus of these films before and after sintering were measured using nanoindentation techniques.
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Liu, Y., Rosidian, A. & Claus, R.O. Mechanical Properties of Electrostatically Self-Assembled Al2O3–ZrO2 Nanocomposites Prepared at Room Temperature. Journal of Cluster Science 10, 421–428 (1999). https://doi.org/10.1023/A:1022629110612
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DOI: https://doi.org/10.1023/A:1022629110612