Abstract
The deposition of the condensed phase YBa2Cu3O7−x from a gas mixture composed of YCl3, BaCl2, Cu3Cl3, and Ar reacting with another consisting of O2 and Ar in a flow system at elevated temperatures was investigated by means of the virtual equilibrium model, and the deposition rates were computed as a function of input gas stream compositions. The optimum growth conditions were identified.
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S. J. Lee, E. D. Rippert, B. Y. Jin, S. N. Song, S. J. Hwu, K. Poeppelmeier, and J. B. Ketterson,Appl. Phys. Lett. 51, 1194–1196 (1987).
D. W. Murphy, S. Sunshine, R. B. Van Dover, R. J. Cava, B. Batlogg, S. M. Zahurak, and L. F. Schneemeyer,Phys. Rev. Lett. 58, 1888–1890 (1987).
P. H. Hor, R. L. Meng, Y. Q. Wang, L. Gao, Z. J. Huang, J. Bechtold, K. Forster, and C. W. Chu,Phys. Rev. Lett. 58, 1891–1894 (1987).
C. Webb, S.-L. Weng, J. N. Eckstein, N. Missert, K. Char, D. G. Schlom, E. S. Hellman, M. R. Beasley, A. Kapitulnik, and J. S. Harris, Jr,Appl. Phys. Lett. 51, 1191–1193 (1987).
B. Oh, M. Naito, S. Arnason, P. Rosenthal, R. Barton, M. R. Beasley, T. H. Geballe, R. H. Hammond, and A. Kapitulnik,Appl. Phys. Lett. 51, 852–854 (1987).
S. Jin, T. H. Tiefel, R. C. Sherwood, G. W. Kammlott, and S. M. Zahurak,Appl. Phys. Lett. 51, 943–945 (1987).
C. E. Rice, R. B. Van Dover, and G. J. Fisanick,Appl. Phys. Lett. 51, 1842–1844 (1987).
A. H. Hamdi, J. V. Mantese, A. L. Micheli, R. C. O. Laugal, and D. F. Dungan,Appl. Phys. Lett. 51, 2152–2154 (1987).
B.-Y Tsaur, M. S. Dilorio, and A. J. Strauss,Appl. Phys. Lett. 51, 858–860 (1987).
R. S. Roth, K. L. Davis, and J. R. Dennis,Adv. Ceram. Mater. 2(3B), 303–312 (1987).
P. K. Gallagher,Adv. Ceram. Mater. 2(3B), 632–639 (1987).
H. M. O'Bryan and P. K. Gallagher,Adv. Ceram. Mater. 2(3B), 640–648 (1987).
P. Gibart, M. Robbins, and A. B. Kane,J. Cryst. Growth 24/25, 166–171 (1974).
S. Ito, H. Miyashita, and N. Yoneda,J. Cryst. Growth 73, 167–174 (1985).
The Collected Works of J. Willard Gibbs, Vol.1,Thermodynamics (Yale University Press, New Haven, 1957), pp. 62–70.
Y. K. Rao,Chem. Eng. Educ. 19, 40–43, 46–49 (1985).
W. Piekarczyk,J. Cryst. Growth 89, 267–286 (1988).
I. Barin and O. KnackeThermochemical Properties of Inorganic Substances (Springer-Verlag, Berlin, 1973).
I. Barin, O. Knacke, and O. Kubaschewski,Thermochemical Properties of Inorganic Substances. Supplement (Springer-Verlag, Berlin, 1977).
M. W. Chase, Jr., C. A. Davies, J. R. Downey, Jr., D. J. Frurip, R. A. McDonald, and A. N. Syverud,JANAF Thermochemical Tables, 3rd edn. (American Chemical Society, Washington, D. C., 1986).
G. C. Ulmer,High-Temperature Oxides, Part I, A. M. Alper, ed. (Academic Press, New York, 1970), p. 251.
Y. K. Rao,Stoichiometry and Thermodynamics of Metallurgical Processes, (Cambridge University Press, Cambridge and New York, 1985), Chap. 11.
Y. K. Rao and H. G. Han,Mathematical Modelling of Materials Processing Operations, J. Szekely, L. B. Hales, H. Henein, N. Jarrett, K. Rajamani, and I. Samarsekera, eds. (The Metallurgical Society, Warrendale, Pennsylvania, 1987), p. 957.
T. O. Sedgwick,J. Electrochem. Soc. 111, 1381–1383 (1964).
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Rao, Y.K., Kim, S.S. Chemical vapor deposition of the superconductor YBa2Cu3O7−x (s) from the gas phase. J Supercond 2, 395–407 (1989). https://doi.org/10.1007/BF00618526
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DOI: https://doi.org/10.1007/BF00618526